Hvax

Clean Room

The purpose of every clean room is to control an environment by limiting the presence of sub-micron particles and modifying inadequate environmental conditions.

The level to which the environment is controlled is what separates one clean room from another. For instance, a Class 10 clean room has 10 particles of size 0.5 microns per cubic foot of air, whereas a Class 100,000 clean room has 100,000 particles of size 0.5 micron per cubic foot of air.

When it comes to clean rooms, HVAC means a lot more than comfort. The clean room HVAC controls the temperature and the humidity to your appropriate levels of precision, similar to standard HVAC. In addition to comfort, clean room HVACs differentiates themselves from conventional systems with their increased air supply, airflow patterns, use of high efficiency filters and room pressurization. The increased air supply brings more air changes per hour with new HEPA filtered air circulating into the clean room many times per hour.

Design Guidelines

Cleanroom Classification Air Flow Velocity Air Changes Per Hour
ISO 4 Class 10 50 - 90 fpm 350 - 600
ISO 5 Class 100 40 - 80 fpm 240 - 480
ISO 6 Class 1000 25 - 40 fpm 150 - 240
ISO 7 Class 10000 10 - 15 fpm 40 - 60
ISO 8 Class 100000 1 - 8 fpm 5 - 20
Filter Type Filter Efficiency Penetration Test Sacn Test
A 99.97 % @ 0.3 Mil STD 282 None
B 99.97 % @ 0.3 Mil STD 282 * None
C 99.99 % @ 0.3 Mil STD 282 Photometer
D 99.999 % @ 0.3 Mil STD 282 Photometer
E 99.97 % @ 0.3 Mil STD 282 * Photometer
F 99.999 % @ 0.1 IEST-RP-CC007 Particle Counter
Class Name 0.1 Microns 0.2 Microns 0.3 Microns 0.5 Microns 5.0 Microns
M1 9.91 2.14 0.875 0.283
M1.5(1) 35 7.5 3 1
M2 99.1 21.4 8.75 2.83
M2.5 (10) 350 75 30 10
M3 991 214 87.5 28.3
M3.5 (100) 650 300 100
M4 2140 875 283
M4.5 (1000) 1000 7
M5.5 2839 17.5
M5.5 (10000) 10000 70
M6 28300 175
M6.5 (100000) 100000 700
M7 283000 1750
Note: Particles are per square foot
Federal Standard 209E
Filter Type Application
A Industrial, Hospitals, Food, Plastics
B Nuclear Facilities
C Laminar Flow for Semiconductors and Drug Manufacturing
D Semiconductors and Drug Manufacturing
E Hazardous Biological Containment Facilities
F Semiconductor