The purpose of every clean room is to control an environment by limiting the presence of sub-micron particles and modifying inadequate environmental conditions.
The level to which the environment is controlled is what separates one clean room from another. For instance, a Class 10 clean room has 10 particles of size 0.5 microns per cubic foot of air, whereas a Class 100,000 clean room has 100,000 particles of size 0.5 micron per cubic foot of air.
When it comes to clean rooms, HVAC means a lot more than comfort. The clean room HVAC controls the temperature and the humidity to your appropriate levels of precision, similar to standard HVAC. In addition to comfort, clean room HVACs differentiates themselves from conventional systems with their increased air supply, airflow patterns, use of high efficiency filters and room pressurization. The increased air supply brings more air changes per hour with new HEPA filtered air circulating into the clean room many times per hour.
Cleanroom Classification | Air Flow Velocity | Air Changes Per Hour |
---|---|---|
ISO 4 Class 10 | 50 - 90 fpm | 350 - 600 |
ISO 5 Class 100 | 40 - 80 fpm | 240 - 480 |
ISO 6 Class 1000 | 25 - 40 fpm | 150 - 240 |
ISO 7 Class 10000 | 10 - 15 fpm | 40 - 60 |
ISO 8 Class 100000 | 1 - 8 fpm | 5 - 20 |
Filter Type | Filter Efficiency | Penetration Test | Sacn Test |
---|---|---|---|
A | 99.97 % @ 0.3 | Mil STD 282 | None |
B | 99.97 % @ 0.3 | Mil STD 282 * | None |
C | 99.99 % @ 0.3 | Mil STD 282 | Photometer |
D | 99.999 % @ 0.3 | Mil STD 282 | Photometer |
E | 99.97 % @ 0.3 | Mil STD 282 * | Photometer |
F | 99.999 % @ 0.1 | IEST-RP-CC007 | Particle Counter |
Class Name | 0.1 Microns | 0.2 Microns | 0.3 Microns | 0.5 Microns | 5.0 Microns |
---|---|---|---|---|---|
M1 | 9.91 | 2.14 | 0.875 | 0.283 | |
M1.5(1) | 35 | 7.5 | 3 | 1 | |
M2 | 99.1 | 21.4 | 8.75 | 2.83 | |
M2.5 (10) | 350 | 75 | 30 | 10 | |
M3 | 991 | 214 | 87.5 | 28.3 | |
M3.5 (100) | 650 | 300 | 100 | ||
M4 | 2140 | 875 | 283 | ||
M4.5 (1000) | 1000 | 7 | |||
M5.5 | 2839 | 17.5 | |||
M5.5 (10000) | 10000 | 70 | |||
M6 | 28300 | 175 | |||
M6.5 (100000) | 100000 | 700 | |||
M7 | 283000 | 1750 |
Filter Type | Application |
---|---|
A | Industrial, Hospitals, Food, Plastics |
B | Nuclear Facilities |
C | Laminar Flow for Semiconductors and Drug Manufacturing |
D | Semiconductors and Drug Manufacturing |
E | Hazardous Biological Containment Facilities |
F | Semiconductor |
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